SS21S8 (SiH₄)

Electrochemical Silane Sensor (0–20ppm)

DESCRIPTION

The SS21S8 is an electrochemical sensor designed for high-sensitivity detection of silane (SiH₄) within the 0–20 ppm range. It delivers an output signal of 300 ± 150 nA/ppm and responds within 50 seconds (T90), offering a resolution below 0.1 ppm and repeatability within ±5%. With low cross-sensitivity to interfering gases such as H₂, NO₂, PH₃, and CO, it ensures measurement accuracy even in complex environments. With an operating temperature range of -20℃ to +50℃ and a lifespan of more than 24 months in air, this sensor is ideal for fixed safety systems in the semiconductor industry.

KEY FEATURES

- Measuring Range: 0–20 ppm (Max overload: 40 ppm)
- Output Signal: 300 ± 150 nA / ppm
- Response Time: T90 < 50 sec
- Resolution: <0.1 ppm (typical)
- Repeatability: Within ±5% of signal
- Long-Term Drift: <5% per year
- Operating Temperature: -20℃ to +50℃
- Operating Life: ≥24 months in air
- Low Cross-Sensitivity: CO, H₂, NO₂, PH₃, etc.